I. Nanolithography and Nanofabrication Technology

High resolution electron beam lithography

Greyscale electron beam lithography for 3D profile

Nanoimprint lithography

Talbot nanolithography

Nanoscale reactive ion etch

Deep silicon reactive ion etch by inductively coupled process

Nanoscale metal electroplating

II. Micro nano processing & nanofabrications

Optical components in synchrotron radiation X ray optical system

NIL templates/stamps/shims

SiNx membrane technique

Si membrane technique

Various nanostructures and nanodevices

III. Nanoelectronic devices and infrared photoelectronic devices

High electron mobility transistors (HEMTs) and T gates

Quantum transport in lower dimensional systems: 2DEG, 1DEG, 0DEG quantum dots

Polarization detectors and chips in short infrared wavelengths

Si based photoelectronic detectors and focal plane chips in short infrared wavelengths

IV. Nanophotonics & metasurface

Fabrications and optical properties of 2D nanophotonics & metasurfaces

Coloring effects by nanophotonic structures and metasurfaces

Optical vortex by phase modulation plate technique

Nanobionic structure: technology, science and applications

Nanofabrications of naturally occurring biological nanostructures

Optical and physical property study of fabricated nanobionic structures

Member of the Professors' Committee, School of Information Science and Technology

Associate Editor, Microelectronic Engineering

Committee Member, Holography and Optical Information Processing Professional Committee, Chinese Optical Society

Committee Member, National Microlithography Technology Sub-committee

Committee Member, Science Popularization Committee of Jiusan Society

Remote Review Expert, European Research Council (ERC)

Review Expert for the National Natural Science Foundation of China, Ministry of Science and Technology Special Projects, Ministry of Education Degrees, Pujiang Talent Program, etc.

Reviewer for journals including Nature Communications, ACS Nano, MEE, AO, IJEM, Acta Physica Sinica, Precision Optical Engineering, etc.

Arthur Cooke Memorial Prize, 1991, Condensed Matter Physics Dept, Clarendon Laboratory, University of Oxford

Selected for the National High-level Overseas Talent Introduction Plan, 2012

Best Poster Award, ChinaNano 2015

State Council Special Allowance, 2018

"Pervasive Nanotechnology" course awarded the title of Shanghai Ideological and Political Leading Course, 2021

"Pervasive Nanotechnology" course awarded the Ideological and Political Benchmark Course Award, 2022

Education:

1995: Ph.D. in Science, Department of Condensed Matter Physics, Clarendon Laboratory, University of Oxford, UK

1985: M.Sc. in Science, Shanghai Institute of Technical Physics, Chinese Academy of Sciences; Semiconductor Device Physics and Technology

1982: B.Sc. in Science, Department of Physics, Fudan University, Shanghai; Electronic Physics

Work Experience:

2012-Present: Professor, School of Information Science and Engineering, Fudan University

2002-2012: Chief Scientist, Micro and Nano Technology Centre, Rutherford Appleton Laboratory, UK

1997-2002: Postdoctoral Researcher, Nanoelectronics Research Centre, University of Glasgow, UK

1996-1997: Postdoctoral Researcher, Microelectronics Division, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore

1994-1996: Postdoctoral Researcher, Superconducting Quantum Transport Group, Department of Applied Physics, Delft University of Technology, Netherlands

1985-1990: Assistant Researcher, Infrared Device Processing Laboratory, Shanghai Institute of Technical Physics, Chinese Academy of Sciences

Nanofabrication and Applications (Professional Elective Course for Master's and Ph.D. students, Fudan University)

Pervasive Nanotechnology (Undergraduate General Education Course, Fudan University)

Published SCI papers:150 papers。

Trapezoid-kinoform zone plate lens – a solution for efficient focusing in hard X-ray optics，Xujie Tong, Yifang Chen, Zijian Xu, Yijie Li, Zhenjiang Xing, Chengyang Mu, Jun Zhao, Xiangjun Zhen, Chengwen Mao and Renzhong Tai，Journal of Synchrotron Radiation, Vol.29, pp.386-392, 2022. https://doi.org/10.1107/S1600577522000893.

Precision integration of grating-based polarizers onto focal plane arrays of near-infrared photovoltaic detectors for enhanced contrast polarimetric imaging, Bo Feng, Yifang Chen, Duo Sun, Zongyao Yang, Bo Yang, Xue Li and Tao Li, INTERNATIONAL JOURNAL OF EXTREME MANUFACTURING, Vol.3, Issue3, Article Number 035201, DOI：10.1088/2631-7990/abf5c8，JUL 2021.

A Broadband Photoelectronic Detector in a Silicon Nanopillar Array with High Detectivity Enhanced by a Monolayer Graphene, Bo Feng, Xiaohang Pan, Tao Liu, Shuoqiu Tian, Tianyu Wang, Yifang Chen, NANO LETTERS, Vol. 21, Issue13, pp.5655-5662, DOI10.1021/NanoLett. 1c01244, JUL 14 2021.

Nanofabrication of 30 nm Au zone plates by e-beam lithography and pulse voltage electroplating for soft x-ray imaging, Jingyuan Zhu, Yifang Chen, Shanshan Xie, Lijuan Zhang, Chunpeng Wang, Renzhong Tai, Microelectronic Engineering, 2020, pp 11254, doi:https://doi.org/10.1016/j.mee.2020.111254

Achieving Infrared Detection by All-Si Plasmonic Hot-Electron Detectors with High Detectivity, Bo Feng, Jingyuan Zhu, Bingrui LU, Feifei Liu, Lei Zhou, and Yifang Chen, ACS Nano, DOI: 10.1021/acsnano.9b04236, 03 Jul 2019.

Reconstructing a plasmonic metasurface for a broadband high-efficiency optical vortex in the visible frequency, Bing-Rui Lu, Jianan Deng, Qi Li, Sichao Zhang，Jing Zhou, Lei Zhou and Yifang Chen，Nanoscale, pp 1-8, DOI: 10.1039/c8nr02088d, 2018

Photon-nanojet lens: design, fabrication and characterization, Chen Xu, Sichao Zhang, Jinhai Shao, Bing-Rui Lu, Mehfuz, Reyad; Drakeley, Stacey; Fumin Huang, Yifang Chen, Nanotechnology, 2016, 27(16)

Lithographically generated 3D Lamella layers and its structural color, Sichao Zhang, Yifang Chen* , Bingrui Lu, Jianpeng Liu, Jinhai Shao and Xu Chen, Nanoscale, 2016, 8(17):9118-9127.

High Resolution Plasmonic Structural Colors from Nanohole Arrays with Bottom Metal Disks, Bingrui Lu (#), Chen Xu, Jianfeng Liao, Jianpeng Liu, Yifang Chen, Optics Letters, 2016, 41(7):1400.

Nanofabrication by electron beam lithography and its applications: A review，Yifang Chen, Microelectronic Engineering, 2015,Vol.135, pp.57-72.（ME journal 30th anniversary Invited Review）Highly Cited Paper。